Browsing by Author "Rodriguez, Leonard"

Atomic layer deposition of tantalum oxide and tantalum silicate from chloride precursors

In situ studies of Al2O3 ALD growth and self-cleaning on III-V surfaces by STM and XPS

In situ studies of Al2O3 ALD growth and self-cleaning on III-V surfaces by STM and XPS

In-situ studies of the chemistry of trimethyl-aluminum on III-V semiconductor surfaces

Interface chemistry of Al2O3/III-V upon atomic layer deposition

Molecular Layer Deposition of organic-inorganic hybrid materials for implant BARC applications

Process study of gadolinium aluminate atomic layer deposition from the gadolinium tris-diisopropylacetamidinate precursor

Roughness evolution during the atomic layer deposition of metal oxides

Study of InP surfaces after wet chemical treatments

Study of InP surfaces after wet chemical treatments

Study of InP surfaces after wet chemical treatments

Surface chemistry and interface formation during the atomic layer deposition of alumina from trimethyl aluminum and water on indium phosphide

Wet chemical etching of InP for cleaning applications: II. Oxide removal