Browsing by Author "Saerens, Annelies"
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Publication Effect of in situ boron doping on properties of silicon germanium films deposited by chemical vapor deposition at 400 degrees C
Journal article2001, Journal of Materials Research, (16) 9, p.2607-2612Publication Effect of oxide and W-CMP on the material properties and electromigration behaviour of layered aluminium metallizations
Oral presentation1999, European Workshop Materials for Advanced Metallization; March 8-10, 1999; Oostende, Belgium.Publication Effect of oxide and W-CMP on the material properties and electromigration behaviour of layered aluminum metallisations
Journal article2000, Microelectronic Engineering, (50) 1_4, p.291-299Publication Grain growth, stress, and impurities in electroplated copper
Journal article2002, Journal of Materials Research, (17) 3, p.582-589Publication Internal stresses in aluminium interconnects
Publication Internal stresses in aluminium interconnects
Publication Self-annealing characterization of electroplated copper films
Journal article2000, Microelectronic Engineering, (50) 1_4, p.449-457Publication Self-annealing characterization of electroplated copper films
Oral presentation1999, European Workshop Materials for Advanced Metallization; March 8-10, 1999; Oostende, Belgium.