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Browsing by Author "Saidov, Khakimjon"

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    Controlled and Uniform Wet Etching of Molybdenum Nanowires

    Deng, Kerong
    ;
    Erofeev, Ivan
    ;
    Ray Chowdhuri, Angshuman
    ;
    Saidov, Khakimjon
    ;
    Aabdin, Zainul
    Proceedings paper
    2023-09, 16th International Symposium on Ultra Clean Processing of Semiconductor Surfaces (UCPSS 2023), September 2023, p.351-355
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    Controlled Stepwise Wet Etching of Polycrystalline Mo Nanowires

    Saidov, Khakimjon
    ;
    Erofeev, Ivan
    ;
    Aabdin, Zainul
    ;
    Pacco, Antoine  
    ;
    Philipsen, Harold  
    Journal article
    2024, ADVANCED FUNCTIONAL MATERIALS, (34) 12, p.Art. 2310838
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    Controlling the Wet-Etch Directionality in Nanostructured Silicon

    Aabdin, Zainul
    ;
    Ghosh, Tanmay
    ;
    Pacco, Antoine  
    ;
    Raj, Sanoj
    ;
    Do, Hue Thi Bich
    ;
    Saidov, Khakimjon
    Journal article
    2022, ACS APPLIED ELECTRONIC MATERIALS, (4) 11, p.5191-5198
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    Nanoscale Wet Etching of Molybdenum Interconnects with Organic Solutions

    Deng, Kerong
    ;
    Erofeev, Ivan
    ;
    Chowdhuri, Angshuman Ray
    ;
    Philipsen, Harold  
    ;
    Aabdin, Zainul
    Journal article
    2024, SMALL, (20) 51, p.Art. 2406713
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    Solving the Annealing of Mo Interconnects for Next-Gen Integrated Circuits

    Erofeev, Ivan
    ;
    Hartanto, Antony Winata
    ;
    Saidov, Khakimjon
    ;
    Aabdin, Zainul
    ;
    Pacco, Antoine  
    Journal article
    2024, ADVANCED ELECTRONIC MATERIALS, (10) 9, p.Art. 2400035

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