Browsing by Author "Saidov, Khakimjon"
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Publication Controlled and Uniform Wet Etching of Molybdenum Nanowires
;Deng, Kerong ;Erofeev, Ivan ;Ray Chowdhuri, Angshuman ;Saidov, KhakimjonAabdin, ZainulProceedings paper2023-09, 16th International Symposium on Ultra Clean Processing of Semiconductor Surfaces (UCPSS 2023), September 2023, p.351-355Publication Controlled Stepwise Wet Etching of Polycrystalline Mo Nanowires
Journal article2024, ADVANCED FUNCTIONAL MATERIALS, (34) 12, p.Art. 2310838Publication Controlling the Wet-Etch Directionality in Nanostructured Silicon
Journal article2022, ACS APPLIED ELECTRONIC MATERIALS, (4) 11, p.5191-5198Publication Nanoscale Wet Etching of Molybdenum Interconnects with Organic Solutions
Journal article2024, SMALL, (20) 51, p.Art. 2406713Publication Solving the Annealing of Mo Interconnects for Next-Gen Integrated Circuits
Journal article2024, ADVANCED ELECTRONIC MATERIALS, (10) 9, p.Art. 2400035