Browsing by Author "Saidov, Khakimjon"
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Publication Controlled and Uniform Wet Etching of Molybdenum Nanowires
;Deng, Kerong ;Erofeev, Ivan ;Ray Chowdhuri, Angshuman ;Saidov, KhakimjonAabdin, ZainulProceedings paper2023, 16th International Symposium on Ultra Clean Processing of Semiconductor Surfaces (UCPSS 2023), September 2023, p.351-355Publication Controlled Stepwise Wet Etching of Polycrystalline Mo Nanowires
Journal article2024, ADVANCED FUNCTIONAL MATERIALS, (34) 12, p.Art. 2310838Publication Controlling Etch Anisotropy of Crystalline Germanium Nanostructures
Journal article2025, SMALL, (21) 40, p.e04357Publication Controlling the Wet-Etch Directionality in Nanostructured Silicon
Journal article2022, ACS APPLIED ELECTRONIC MATERIALS, (4) 11, p.5191-5198Publication Nanoscale Wet Etching of Molybdenum Interconnects with Organic Solutions
Journal article2024, SMALL, (20) 51, p.Art. 2406713Publication Solving the Annealing of Mo Interconnects for Next-Gen Integrated Circuits
Journal article2024, ADVANCED ELECTRONIC MATERIALS, (10) 9, p.Art. 2400035