Browsing by Author "Santos, Andreia"
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Publication Energy-efficient optical crosslinking of underlayers for sustainable and low-power semiconductor manufacturing
Journal article2024, JOURNAL OF MICRO-NANOPATTERNING MATERIALS AND METROLOGY-JM3, (23) 3, p.Art. 034602Publication EUV lithographic process enablement with novel litho track hardware
Proceedings paper2021, Conference on Advances in Patterning Materials and Processes XXXVIII Part of SPIE Advanced Lithography Conference, FEB 22-26, 2021, p.116120MPublication EUV single exposure Tip-to-Tip variability control through PEB process optimization in BEOL layers
Proceedings paper2023, International Conference on Extreme Ultraviolet Lithography, OCT 02-05, 2023, p.Art. 127500PPublication Rectification of extreme ultraviolet lithography patterns by directed self-assembly: a roughness and defectivity study
Journal article2024, JOURNAL OF MICRO-NANOPATTERNING MATERIALS AND METROLOGY-JM3, (23) 4, p.Art. 043001