Browsing by Author "Schmidt, M.O."
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Publication A feasibility study of dual damascene porous SiLK resin with spin-on hard masks
Proceedings paper2004, Advanced Metallization Conference 2003, 21/10/2003, p.147-151Publication Influence of frequency on the removal efficiency of nano-particles in a megasonic spray cleaning tool
Proceedings paper2003, Ultra Clean Processing of Silicon Surfaces 2002 - UCPSS, 16/09/2002, p.147-151Publication Influence of hardware and chemistry on the removal of nano-particles in a megasonic cleaning tank
Proceedings paper2003, Ultra Clean Processing of Silicon Surfaces 2002 - UCPSS, 16/09/2002, p.143-147Publication Investigating the role of gas cavitation in megasonic nanoparticle removal
Journal article2004, Micro, (22) 1, p.57-63Publication Resist strip and Cu diffusion barrier etch in Cu BEOL integration schemes in a Mattson HighlandsTM chamber
Proceedings paper2003, Ultra Clean Processing of Silicon Surfaces 2002 - UCPSS, 16/09/2002, p.267-271Publication Using a biased-ICP reactor for PR strip and Cu barrier removal
Journal article2004, Solid State Technology, (47) 4, p.S11-S13