Browsing by Author "Snauwaerts, Jan"
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Publication Carrier Distribution in Silicon Devices by Atomic Force Microscopy on Etched Surfaces
Journal article1994, Appl. Phys. Lett., 64, p.354-356Publication Carrier Profile Determination in Device Structures using AFM-Based Methods
Oral presentation1995, International Workshop on Semiconductor Characterization: Present Status and Needs; January 1995; Gaithersburg, USA.Publication Characterization of a point-contact on silicon using force microscopy-supported resistance measurements
Journal article1995, Appl. Phys. Lett., (66) 12, p.1530-2Publication Lateral and Vertical Dopant Profiling in Semiconductors by Atomic Force Microscopy Using Conducting Tips
Oral presentation1994, American Vacuum Society Meeting; October 24-28, 1994; Denver, USA.Publication Local potential measurements in silicon devices using atomic force microscopy with conductive tips
Proceedings paper1995, 25th European Solid State Device Research Conference - ESSDERC, 25/09/1995, p.477-481Publication Minimizing the Size of Force-Controlled Point-Contacts on Silicon for Carrier Profiling
Publication On the Determination of Two-Dimensional Carrier Distributions
Oral presentation1994, Ion Implantation Technology Conference; June 13-16, 1994; Catania, Italy.Publication Quantitative carrier profiling of silicon devices by nano-srp
Oral presentation1996, NIST 3rd International Workshop on Industrial Applications of SPM; 2-3 May 1996; Gaithersburg, USA.