Browsing by Author "Solak, Harun H."
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Publication Characterization of extreme ultraviolet resists with interference lithography
Oral presentation2005, 31st International Conference on Micro-and Nano- EngineeringPublication EUV resist contrast loss determination using interference lithography
Publication Measuring resist-induced contrast loss using EUV interference lithography
Proceedings paper2010, Extreme Ultraviolet (EUV) Lithography, 21/02/2010, p.76362XPublication Microstepper vs. interference EUV lithography: effects on resist profiles
Proceedings paper2005, 4th International Symposium on EUV Lithography, 7/11/2005