Browsing by Author "Stowers, Jason"
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Publication Characterizing and modeling electrical response to light for metal based EUV photoresists
Proceedings paper2016, Advances in Patterning Materials and Processes XXXIII, 21/02/2016, p.977906Publication Demonstration of an N7 integrated fab process for metal oxide EUV photoresist
Proceedings paper2016, Extreme Ultraviolet (EUV) Lithography VII, 21/02/2016, p.97760BPublication Metal oxide EUV photoresist performance for N7 relevant patterns and processes
Proceedings paper2016, Advances in Patterning Materials and Processes XXXIII, 21/02/2016, p.977904