Browsing by Author "Sun, Jianwu"
- Results Per Page
- Sort Options
Publication Epitaxial Ge Growth in Ultra Narrow STI Patterned Si Wafer
Meeting abstract2015, EMRS Fall Meeting Symposium O: Alternative Semiconductor Integration in Si Microelectronics: Materials, Techniques & Appl., 15/09/2015Publication Ge epitaxial layer growth on Si in ultra narrow STI patterned structures
Proceedings paper2015-05, 9th International Conference on Si Epitaxy and Heterostructures - ICSI9, 17/05/2014, p.21-22Publication Group IV Epi processing, evolution in CMOS from 90 to 10nm node
Proceedings paper2014, ASM 2014 Users Meeting, 25/09/2014Publication High resolution X-ray diffraction for in-line monitoring of Ge MOSFET devices
Proceedings paper2015, International Conference on Frontiers of Characterization and Metrology for Nanoelectronics - FCMN, 14/04/2015, p.217-219Publication Selective growth of strained Ge on relaxed SiGe in shallow trench isolation for p-MOS FINFET
Meeting abstract2014, E-MRS Fall Meeting Symposium J: Alternative Semiconductor Integration in Si Microelectronics, 15/09/2014, p.6 5Publication Strained Ge FINfet structures fabricated by selective epitaxial growth
Proceedings paper2014, 7th International SiGe Technology and Device Meeting - ISTDM, 2/06/2014, p.19-20Publication Strained germanium quantum well p-FinFETs fabricated on 45nm fin pitch using replacement channel, replacement metal gate and germanide-free local interconnect
Proceedings paper2015, Symposium on VLSI Technology, 16/06/2015, p.T56-T57Publication Ultimate nano-electronics: new material and device concepts for scaling nano-electronics beyond the Si roadmap
Journal article2015, Microelectronic Engineering, 132, p.218-225Publication Use of X-ray techniques in the development of Ge MOSFET devices
Meeting abstract2014, EMRS Fall Meeting, Symposium J: Alternative Semiconductor Integration in Si Microelectronics: Materials, Techniques & Appl., 15/09/2014