Browsing by Author "Sutani, Takumichi"
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Publication Electron beam metrology for advanced technology nodes
Journal article2019, Japanese Journal of Applied Physics, (58) SD, p.SD0801Publication Enabling CD SEM metrology for 5nm technology node and beyond
Proceedings paper2017, Metrology, Inspection, and Process Control for Microlithography XXXI, 26/02/2017, p.1014512Publication Impact of annealing temperature on DSA process: toward faster assembly kinetics
Proceedings paper2018, Advances in Patterning Materials and Processes XXXV, 24/02/2018, p.105860TPublication LCDU and placement improvement of contacts using EUV templated DSA
Oral presentation2018, SPIE 2018