Browsing by Author "Timmermans, Frank"
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Publication Perspectives and tradeoffs of absorber materials for high NA EUV lithography
Journal article2020, JOURNAL OF MICRO-NANOLITHOGRAPHY MEMS AND MOEMS, (19) 4Publication Perspectives and tradeoffs of novel absorber materials for high NA EUV lithography
Proceedings paper2020, Extreme Ultraviolet (EUV) Lithography XI, 23/02/2020, p.1132309Publication Stitching for High NA: zooming in on CDU budget
Proceedings paper2023, International Conference on Extreme Ultraviolet Lithography, OCT 02-05, 2023, p.Art. 1275002