Browsing by Author "Tjiu, Weng Weei"
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Publication Controlled Stepwise Wet Etching of Polycrystalline Mo Nanowires
Journal article2024, ADVANCED FUNCTIONAL MATERIALS, (34) 12, p.Art. 2310838Publication Digital Etching of Molybdenum Interconnects Using Plasma Oxidation
Publication Nanoscale Wet Etching of Molybdenum Interconnects with Organic Solutions
Journal article2024, SMALL, (20) 51, p.Art. 2406713Publication Solving the Annealing of Mo Interconnects for Next-Gen Integrated Circuits
Journal article2024, ADVANCED ELECTRONIC MATERIALS, (10) 9, p.Art. 2400035