Browsing by Author "Tomasini, Pierre"
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Publication Impact of the pre-epi bake conditions in embedded Si1-xGex source/drain junctions
Meeting abstract2009, E-MRS Spring Meeting Symposium I: Silicon and germanium Issues for Future CMOS Devices, 8/06/2009Publication Influence of the strain-relaxation induced defect creation on the lekage current of embedded Si1-xGex source/drain junctions
Journal article2009-06, Physica Status Solidi C, (6) 8, p.1901-1905Publication Stability of silicon germanium stressors
Journal article2010, Thin Solid Films, (518) 6, Suppl. 1, p.S133-S135Publication Stress analysis of Si1-xGex embedded source/drain junctions
Journal article2008, Materials Sicience in Semiconductor Processing, (11) 5, p.285-290