Browsing by Author "Torres, J. Andres"

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Calibration and application of a DSA Compact model for grapho-epitaxy hole processes using contour-based metrology

Fenger, Germain
;
Burbine, Andrew
;
Torres, J. Andres
;
Ma, Yuansheng
;
Granik, Yuri
Proceedings paper
2014, Photomask Technology, 16/09/2014, p.92351X
Directed self-assembly (DSA) grapho-epitaxy template generation with immersion lithography

Ma, Yuansheng
;
Lei, Junjiang
;
Torres, J. Andres
;
Hong, Le
;
Word, James
;
Fenger, Germain
Proceedings paper
2015, Alternative Lithographic Technologies VII, 22/02/2015, p.942306
Directed self-assembly graphoepitaxy template generation with immersion lithography

Ma, Yuansheng
;
Lei, Junjiang
;
Torres, J. Andres
;
Hong, Le
;
Word, James
;
Fenger, Germain
Journal article
2015, Journal of Micro/Nanolithography MEMS and MOEMS, (14) 3, p.31216