Browsing by Author "Tung, C. Maryann"
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Publication Design method for the integration of DSA via patterning in sub-7 nm circuits
Oral presentation2016, International Nanotechnology Conference - INC12Publication Design strategy for integrating DSA via patterning in sub-7 nm interconnects
Proceedings paper2016, Design-Process-Technology Co-optimization for Manufacturability X, 21/02/2016, p.97810NPublication Design strategy for layout of Sub-Resolution Directed Self-Assembly Assist Features (SDRAFs)
Proceedings paper2016, Electron, Ion, and Photon Beam Technology and Nanofrabrication - EIPBN, 31/05/2016, p.5C4