Browsing by Author "Tung, Maryann C."
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Publication Density-balancing mask sssignment for via patterning with directed self-assembly
Publication Design method and algorithms for directed self-assembly aware via layout decomposition in sub-7 nm circuits
Journal article2016-11, Journal of Micro/Nanolithography MEMS and MOEMS, (15) 4, p.43506Publication Templated DSA vias in sub-7 nm circuits: Design strategy and DSA-aware via decomposition
Proceedings paper2016-10, International Symposium on DSA, 11/10/2016