Browsing by Author "Tuominen, M."

Now showing 1 - 3 of 3

Island growth in the atomic layer deposition of zirconium oxide and aluminium oxide on hydrogen-terminated silicon: growth mode modelling and transmission electron microscopy

Puurunen, Riikka
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Vandervorst, Wilfried
;
Besling, Wim F. A.
;
Richard, Olivier
;
Bender, Hugo
Journal article
2004, Journal of Applied Physics, (96) 9, p.4878-4889
Sr-Cp precursor based ALD SrTiO3 for capacitor applications

Maes, Jan
;
Blomberg, T.
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Matero, R.
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Tuominen, M.
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Swerts, Johan
;
Menou, Nicolas
;
Wang, Xin Peng
Proceedings paper
2008, 8th International Conference on Atomic Layer Deposition - ALD, 29/06/2008
Surface preparation and interfacial stability of high-k dielectrics deposited by atomic layer chemical vapor deposition

Tsai, Wilman
;
Carter, Richard
;
Nohira, Hiroshi
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Caymax, Matty
;
Conard, Thierry
;
Cosnier, Vincent
Journal article
2003, Microelectronic Engineering, (65) 3, p.259-272