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Browsing by Author "Turquat, Ch."

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    Composition control and ferroelectric properties of sidewall Sr0.8Bi2.2Ta2O9 in integrated 3-Dimensional ferroelectric capacitors

    Goux, Ludovic  
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    Lisoni, Judit
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    Schwitters, Michael
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    Paraschiv, Vasile  
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    Maes, D.
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    Haspeslagh, Luc  
    Proceedings paper
    2005, Proceedings 1st International Conference on Memory Technology and Design, 21/05/2005, p.163-166
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    Composition control and ferrolectric properties of sidewalls in three-dimensional SrBi2Ta2O9-based ferroelectric capacitors

    Goux, Ludovic  
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    Lisoni, Judit
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    Schwitters, Michael
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    Paraschiv, Vasile  
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    Maes, David
    Journal article
    2005-09, Journal of Applied Physics, (98) 5, p.054507-1-054507-7
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    Enhanced oxidation of TiAIN barriers integrated in three dimensional ferroelectric capacitor structures

    Lisoni, Judit
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    Johnson, Jo
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    Goux, Ludovic  
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    Paraschiv, Vasile  
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    Maes, David
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    Vander Meeren, Hans
    Journal article
    2007-01, Journal of Applied Physics, (101) 1, p.14908
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    Integrated functional oxides in non-volatile memory devices

    Muller, Christophe
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    Courtade, Lorene
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    Turquat, Ch.
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    Menou, Nicolas
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    Lisoni, Judit
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    Goux, Ludovic  
    Meeting abstract
    2008, Workshop Oxydes Fontionnels pour l'Integration en Micro- et Nano-Electronique, 16/03/2008
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    Integration of resistive switching NiO in small via structures from localized oxidation in nickel metallic layer

    Courtade, Lorene
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    Turquat, Ch.
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    Lisoni, Judit
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    Goux, Ludovic  
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    Wouters, Dirk
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    Deleruyelle, C.
    Proceedings paper
    2008, 38th European Solid-State Device Research Conference - ESSDERC, 15/09/2008, p.218-221
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    Microstructural characterization of side walls in SBT 3D capacitors

    Menou, N.
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    Goux, Ludovic  
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    Lisoni, Judit
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    Schwitters, M.
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    Turquat, Ch.
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    Madigou, V.
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    Hodeau, J-L.
    Oral presentation
    2004, 16th International Symposium on Integrated Ferroelectrics
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    NiO resistive switching material integrated at the bottom of via holes from localized oxidation of nickel metallic layer

    Courtade, Lorene
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    Muller, Ch.
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    Turquat, Ch.
    ;
    Lisoni, Judit
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    Goux, Ludovic  
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    Deleruyelle, D.
    Oral presentation
    2009, 18th Workshop Materials for Advanced Metallization - MAM
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    Oxidation kinetics of Ni metallic films: formation of NiO-based resistive switching structures

    Courtade, L.
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    Turquat, Ch.
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    Muller, Christophe
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    Lisoni, Judit
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    Goux, Ludovic  
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    Wouters, Dirk
    Journal article
    2008, Thin Solid Films, (516) 12, p.4083-4092
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    Side walls contribution in integrated 3D SBT-based capacitors: electrical and microstructural point of view

    Menou, N.
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    Madigou, V.
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    Turquat, Ch.
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    Goguenheim, D.
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    Muller, Ch.
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    Goux, Ludovic  
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    Lisoni, Judit
    Oral presentation
    2004, E-MRS Spring Meeting Symposium D: Functional Oxides for Advanced Semiconductor Technologies
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    Sidewalls contribution in integrated three-dimensional Sr0.8Bi2.2Ta2O9-based ferroelectric capacitors

    Menou, M.
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    Turquat, Ch.
    ;
    Madigou, V.
    ;
    Muller, Ch.
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    Goux, Ludovic  
    ;
    Lisoni, Judit
    Journal article
    2005, Applied Physics Letters, (87) 7, p.073502-1-073502-3
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    Solution growth of metal-organic complex CuTCNQ in small dimension interconnect structures

    Demolliens, A.
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    Muller, Ch.
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    Muller, Robert
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    Turquat, Ch.
    ;
    Goux, Ludovic  
    ;
    Deleruyelle, D.
    Journal article
    2010, Journal of Crystal Growth, (312) 22, p.3267-3275

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