Browsing by Author "Vaid, Varun"
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Publication DSA materials contributions to the defectivity performance of the 14nm half-pitch LiNe flow @ imec
; ; Publication Improved cost-effectiveness of the block co-polymer anneal process for DSA
Proceedings paper2016, Alternative Lithographic Technologies VIII, 20/02/2016, p.97771ZPublication Towards cost-effective and low defectivity DSA flows for line/space patterning
Proceedings paper2015, 1st International Symposium on DSA, 25/10/2015