Browsing by Author "Van Hemmen, J.L."
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Publication Physical characterization of ALD Al2O3 films deposited on GaAs substrates
Meeting abstract2008, 14th International Conference on Thin Films - ICTF 14, 17/11/2008, p.46Publication Thermal and plasma enhanced atomic layer deposition of Al2O3 on GaAs substrates
Journal article2009, Journal of the Electrochemical Society, (156) 4, p.H255-H262Publication Thermal and plasma enhanced atomic layer deposition of Al2O3 on GaAs substrates
; ; ; ; Meeting abstract2008, 8th International Conference on Atomic Layer Deposition - ALD, 30/06/2008