Browsing by Author "Van den berg, J."

Now showing 1 - 3 of 3

Characterisation of high-k containing nanolayers by reference-free X-ray fluorescence analysis with synchrotron radiation

Kolbe, M.
;
Beckhoff, B.
;
Krumrey, M.
;
Reading, M.
;
Van den berg, J.
;
Conard, Thierry
;
De Gendt, Stefan
Proceedings paper
2009, Analytical Techniques for Semiconductor Materials and Process Characterization 6 - ALTECH, 4/10/2009, p.293-300
High resolution medium energy ion scattering analysis for the quantitative depth profiling of ultra thin high-k Hf based films

Van den berg, J.
;
Reading, M.A.
;
Armour, D.G.
;
Bailey, P.
;
Noakes, T.
;
Conard, Thierry
Meeting abstract
2009, 5th International Workshop on High-Resolution Depth Profiling, 15/11/2009
Physical characterization of the metal/high-k layer interaction upon annealing

Conard, Thierry
;
Franquet, Alexis
;
Vandervorst, Wilfried
;
Reading, M.
;
Van den berg, J.
Proceedings paper
2008, Physics and Technology of High-k Dielectrics 6, 12/10/2008, p.433-442