Browsing by Author "Van der Donck, Tom"
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Publication Correlation between Cu microstructure and TSV Cu pumping
Proceedings paper2014, IEEE Electronic Components and Technology Conference, 27/05/2014, p.613-619Publication Effect of cathodic hydrogen charging on the wear behavior of 5754 Al alloy
Journal article2017, Wear, 390, p.295-301Publication Effect of deposition parameters on the stress gradient of CVD and PECVD poly-SiGe for MEMS applications
; Celis, Jean-PierreProceedings paper2004-01, Micromachining and Microfabrication Process Technology IX, 25/01/2004, p.8-18Publication Pulsed laser deposition of bismuth telluride thin films for microelectromechanical systems thermoelectric energy harvesters
Publication Stacked boron doped poly-crystalline silicon-germanium layers: an excellent MEMS structural layer
Proceedings paper2008, Passive and Electromechanical Materials and Integration, 24/03/2008, p.1075-J05-02Publication Statistical distribution of through-silicon via Cu pumping
Journal article2017, IEEE Transactions on Device and Materials Reliability, (17) 3, p.549-559Publication Structural and electrical properties of pulsed laser deposited bismuth telluride based alloys