Browsing by Author "Verheyden, Kurt"
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Publication Emissivity independent heating of 3D patterns
Proceedings paper2007, Extended Abstracts of the 7th International Workshop on Junction Technology - IWJT, 8/06/2007, p.141-142Publication Improved thermal stability of Ni-silicides on Si:C epitaxial layers
Journal article2007, Microelectronic Engineering, 84, p.2542-2546Publication Observation and suppression of nickel germanide overgrowth on germanium substrates with patterned SiO2 structures
; ; ; Publication Pattern-dependent heating of 3D structures
Publication Widening of FUSI RTP process window by spike anneal
Proceedings paper2007, 15th IEEE International Conference on Advanced Thermal Processing of Semiconductors - RTP, 2/10/2007, p.111-117