Browsing by Author "Vurpillot, Francois"
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Publication APT analysis of short (~200 nm) Si nanowires embedded in SiO2 and HfO2
Oral presentation2016, APT&MPublication Atom probe tomography analysis of SiGe fins embedded in SiO2: facts and artefacts
Journal article2017, Ultramicroscopy, 179, p.100-107Publication Challenges for APT in advanced semiconductor technology research
Meeting abstract2016, Atom Probe Tomography & Microscopy - APT&M, 12/06/2016Publication Emitter shape evolution during field evaporation and its impact on the reconstructed data of SiGe fins embedded in SiO2
Meeting abstract2016, APT&M, 12/06/2016