Browsing by Author "Weber, U."
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Publication Electrical characterization of capacitors with AVD- deposited hafnium silicates as high-k gate dielectric
Journal article2005, Journal of the Electrochemical Society, (152) 11, p.F185-F189Publication HfSiO(N) composition depth profiling: can we get a quantitative answer using SIMS?
Proceedings paper2005, SIMS XV - 15th International Conference on Secondary Ion Mass Spectrometry, 12/09/2005Publication Improving CMOS performance by AVD® grown high-k dielectrics and advanced metal electrodes
Proceedings paper2005, Advanced Gate Stack, Source/Drain, and Channel Engineering for Si-Based CMOS: New Materials, Processes, and Equipment, 15/05/2005, p.293Publication On anomalous emitter regions forming during phosphorous diffusion processing of crystalline silicon solar cells