Browsing by Author "Werkhoven, Chris"
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Publication Electrical properties and reliability of ultrathin remote plasma enhanced CVD Si3N4 layers
Oral presentation1999, 30th IEEE Semiconductor Interface Specialists ConferencePublication Ge deep sub-micron HiK/MG pFET with superior drive compared to Si HiK/MG state-of-the-art reference
Journal article2007-01, Semiconductor Science and Technology, (22) 1, p.S221-S226Publication Influence of pre and post process conditions on the composition of thin Si3N4 thin films (3nm) studied by XPS and TOFSIMS
Proceedings paper2000, Structure and Electronic Properties of Ultrathin Dielectrics on Silicon and Related Structures; November 1999; Boston, MA, USA., p.69-74Publication Influence of pre and post process conditions on the composition of thin Si3Ni4 thin films (3nm) studied by XPS and TOFSIMS
Oral presentation1999, Materials Research Society Fall Meeting; October 1999; Boston, MA, USA.Publication Single wafer CVD of silicon nitride for CMOS gate applications
Proceedings paper1999, Ultrathin SiO2 High-K Materials for ULSI Gate Dielectrics, 5/04/1999, p.147-154