Browsing by Author "Wu, Stewart"
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Publication Better prediction on patterning failure mode with hotspot aware OPC modeling
Proceedings paper2021, Metrology, Inspection, and Process Control for Microlithography XXXIV, 22/02/2021, p.1161112Publication Improving OPC Model Accuracy of Dry Resist for Low k1 EUV Patterning
Proceedings paper2024, Conference on DTCO and Computational Patterning III, FEB 26-29, 2024, p.Art. 129540LPublication OPC and Modeling Solution towards 0.55NA EUV Stitching
Proceedings paper2024, Optical and EUV Nanolithography XXXVII, 2024-02-25, p.129530KPublication Unsupervised Machine Learning based SEM Image Denoising for robust Contour Detection
Proceedings paper2021, International Conference on Extreme Ultraviolet Lithography, SEP 27-OCT 01, 2021