Browsing by Author "Yaegashi, Hidetami"
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Publication Co-optimization of lithographic and patterning processes for improved EPE performance
Publication Impact of local variability on defect-aware process windows
Proceedings paper2019, Extreme Ultraviolet (EUV) Lithography X, 24/02/2019, p.109570HPublication Understanding the significance of local variability in defect-aware process windows
Journal article2020, IEEE Transactions on Semiconductor Manufacturing, (33) 1, p.42-52