Browsing by Author "Yamaguchi, Atsuko"
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Publication 3D measurement of 3D NAND memory hole with CD-SEM and tilted FIB
Publication Contact inspection of Si nanowire with SEM voltage contrast
Proceedings paper2018, Metrology, Inspection, and Process Control for Microlithography XXXII, 25/02/2018, p.105850BPublication Precise measurement of thin-film thickness in 3D-NAND device with CD-SEM
Journal article2018, Journal of Micro/Nanolithography MEMS and MOEMS, (17) 2, p.24002Publication Variability study with CD-SEM metrology for STT-MRAM: correlation analysis between physical dimensions and electrical property of the memory element