Browsing by Author "Zhang, Jianran"
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Publication Dry cleaning of WS2 using reducing downstream plasma
Meeting abstract2019, PESM 2019, 20/05/2019Publication Reactive plasma cleaning and restoration of transition metal dichalcogenide monolayers
Journal article2021, NPJ 2D MATERIALS AND APPLICATIONS, (5) 1, p.17Publication Use of a thermally degradable chemical vapor deposited polymer film for low damage plasma processing of highly porous dielectrics
Journal article2019, ACS Applied Electronic Materials, (1) 12, p.2602-2611