Browsing by Author "Zotovich, Alexey"
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Publication Advanced etching for nanodevices and 2D materials
Meeting abstract2016, SNM special session at MNE Conference, 19/09/2016Publication Comparative analysis of the factors leading to low-k degradation during the integration process
Meeting abstract2014, International Conference in Micro- and Nanoelectronics, 6/10/2014Publication Comparison between Vacuum Ultra-Violet emission of CF4/Ar and CF3I/Ar plasmas in CCP chamber for low-k etching
Journal article2016, Plasma Sources Science and Technology, (25) 5, p.55001Publication Improved plasma resistance for porous low-k dielectrics by pore stuffing approach
Journal article2015, ECS Journal of Solid State Science and Technology, (4) 1, p.N3098-N3107Publication Low-k protection from F radicals and VUV photons using a multilayer pore grafting approach
Publication Ultra low-k etching by neutral beams produced from CF4/Ar and SF6/Ar ICP plasmas
Meeting abstract2016, Plasma Etch and Strip in Microtechnology - PESM, 9/05/2016Publication Vacuum ultra-violet emission of CF4 & CF3I containing plasmas and their effect on low-k materials
Journal article2015, Journal of Physics D: Applied Physics, (48) 39, p.395202