Browsing by Author "van Dijk, Joep"
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Publication Edge placement error analysis for N7 logic patterning options
Publication SAQP and EUV block patterning of BEOL metal layers on IMEC's iN7 platform
Proceedings paper2017, Extreme Ultraviolet (EUV) Lithography VIII, 27/02/2017, p.101430HPublication The imec iN7 EUV platform: M2-Block and Via patterning developments
Proceedings paper2016, International Symposium on Extreme Ultraviolet Lithography - EUVL, 24/10/2016Publication Understanding of Out-of-Band DUV light in EUV lithography: controlling impact on imaging and mitigation strategies
Proceedings paper2015, 31st European Mask and Lithography Conference, 22/06/2015, p.96610B