Browsing by Author "van Drieenhuizen, Bert"
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Publication 11-Megapixel CMOS-integrated SiGe micromirror arrays for high-end applications
Journal article2010, Journal of Microelectromechanical Systems, (19) 1, p.202-214Publication Highly reliable CMOS-integrated 11MPixel SiGe-based micro-mirror arrays for high-end industrial applications
Proceedings paper2008, Technical Digest International Electron Devices Meeting - IEDM, 15/12/2008, p.655-658Publication Packaging of 11MPixel CMOS-integrated SiGe micro-mirror arrays
Proceedings paper2009, 22nd International IEEE Conference on Micro Electro Mechanical Systems - MEMS, 25/01/2009, p.136-139Publication Performance of FlexRay, a fully programmable illumination system for generation of freeform sources on high NA immersion systems