Browsing by author "Shaughnessy, Derrick"
Now showing items 1-8 of 8
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Advances in optical carrier profiling through high-frequency modulated optical reflectance
Bogdanowicz, Janusz; Dortu, Fabian; Clarysse, Trudo; Vandervorst, Wilfried; Shaughnessy, Derrick; Salnick, Alex; Nicolaides, Lena; Opsal, Jon (2007) -
Advances in optical carrier profiling through high-frequency modulated optical reflectance
Bogdanowicz, Janusz; Dortu, Fabian; Clarysse, Trudo; Vandervorst, Wilfried; Shaughnessy, Derrick; Salnick, Alex; Nicolaides, Lena; Opsal, Jon (2008) -
Impact of inactive dopants in chemical vapor deposition layers on photomodulated optical reflectance
Bogdanowicz, Janusz; Dortu, Fabian; Clarysse, Trudo; Vandervorst, Wilfried; Shaughnessy, Derrick; Salnick, Alex; Nicolaides, Lena (2008) -
Impact of inactive dopants in chemical vapor deposition layers on photomodulated optical reflectance
Bogdanowicz, Janusz; Dortu, Fabian; Clarysse, Trudo; Vandervorst, Wilfried; Shaughnessy, Derrick; Salnick, Alex; Nicolaides, Lena (2008) -
Non-destructive extraction of junction depths of active doping profiles from photomodulated optical reflectance offset curves
Bogdanowicz, Janusz; Dortu, Fabian; Clarysse, Trudo; Vandervorst, Wilfried; Rosseel, Erik; Nguyen, Duy; Shaughnessy, Derrick; Salnick, Alex; Nicolaides, Lena (2009) -
Nondestructive extraction of junction depths of active doping profiles from photomodulated optical reflectance offset curves
Bogdanowicz, Janusz; Dortu, Fabian; Clarysse, Trudo; Vandervorst, Wilfried; Rosseel, Erik; Nguyen, Duy; Shaughnessy, Derrick; Salnick, Alex; Nicolaides, Lena (2010) -
Theory of photomodulated optical reflectance on active doping profiles in silicon
Bogdanowicz, Janusz; Dortu, Fabian; Clarysse, Trudo; Vandervorst, Wilfried; Shaughnessy, Derrick; Salnick, Alex (2009) -
Transfer from Rs-based to PMOR-based ion implantation process monitoring
Smets, Gerrit; Rosseel, Erik; Sterckx, Gunther; Bogdanowicz, Janusz; Vandervorst, Wilfried; Shaughnessy, Derrick (2011)