Browsing by author "Muller, Matthias"
Now showing items 1-7 of 7
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ALD on high mobility channels: engineering the proper gate stack passivation
Sioncke, Sonja; Lin, Hang Chun; Adelmann, Christoph; Brammertz, Guy; Delabie, Annelies; Conard, Thierry; Franquet, Alexis; Caymax, Matty; Meuris, Marc; Struyf, Herbert; De Gendt, Stefan; Heyns, Marc; Fleischmann, Claudia; Temst, K.; Vantomme, Andre; Muller, Matthias; Kolbe, Michael; Beckhoff, Burkhard; Schmeisser, Dieter; Tallarida, Massimo (2010) -
Atomic layer deposition of Al2O3 on S-passivated Ge
Sioncke, Sonja; Ceuppens, Joris; Lin, Dennis; Nyns, Laura; Delabie, Annelies; Struyf, Herbert; De Gendt, Stefan; Muller, Matthias; Beckhoff, Burkhard; Caymax, Matty (2011) -
Atomic layer deposition of high-k dielectrics on sulphur-passivated germanium
Sioncke, Sonja; Lin, Dennis; Nyns, Laura; Brammertz, Guy; Delabie, Annelies; Conard, Thierry; Franquet, Alexis; Meuris, Marc; Struyf, Herbert; De Gendt, Stefan; Heyns, Marc; Fleischmann, Claudia; Temst, Kristiaan; Vantomme, Andre; Muller, Matthias; Kobe, Michael; Beckhoff, Burkhard; Caymax, Matty (2011) -
S-passivation of the Ge gate stack using (NH4)2S
Sioncke, Sonja; Fleischmann, Claudia; Lin, Dennis; Vrancken, Evi; Caymax, Matty; Meuris, Marc; Temst, Kristiaan; Vantomme, Andre; Muller, Matthias; Kolbe, Michael; Beckhoff, Burkhard (2010) -
S-passivation of the Ge gate stack: Tuning the gate stack properties by changing the atomic layer deposition oxidant precursor
Sioncke, Sonja; Lin, Dennis; Nyns, Laura; Brammertz, Guy; Delabie, Annelies; Conard, Thierry; Franquet, Alexis; Rip, Jens; Struyf, Herbert; De Gendt, Stefan; Muller, Matthias; Beckhoff, Burkhard; Caymax, Matty (2011) -
Self-affine surface roughness of chemically and thermally cleaned Ge surfaces
Fleischmann, Claudia; Houssa, Michel; Sioncke, Sonja; Beckhoff, Burkhard; Muller, Matthias; Honicke, Phillip; Meuris, Marc; Temst, Kristiaan; Vantomme, Andre (2011) -
Towards passivation of Ge(100) surfaces by sulfur adsorption from (NH4)2S solution: a combined NEXAFS, STM and LEED study
Fleischmann, Claudia; Sioncke, Sonja; Couet, S.; Schouteden, K.; Beckhoff, Burkhard; Muller, Matthias; Honicke, P.; Kolbe, Michael; Van Haesendonck, C.; Meuris, Marc; Temst, Kristiaan; Vantomme, Andre (2011)