Browsing by author "Gromova, Maria"
Now showing items 1-9 of 9
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Feasibility study of using non-released poly-SiGe bolometers as fingerprint sensors
Gromova, Maria; De Moor, Piet; Van Hoof, Chris (2005) -
Highly reliable and extremely stable SiGe micro-mirrors
Gromova, Maria; Haspeslagh, Luc; Verbist, Agnes; Du Bois, Bert; Van Hoof, Rita; Eyckens, Brenda; Sijmus, Bram; De Wolf, Ingrid; Simons, Veerle; Muller, Philippe; Lauwagie, Tom; Willegems, Myriam; Locorotondo, Sabrina; Boullart, Werner; Baert, Kris; Witvrouw, Ann (2007-01) -
Microcrystalline silicon germanium for MEMS applications
Gromova, Maria (2007-06) -
Novel high growth rate processes for depositing poly-SiGe structural layers at CMOS compatible temperatures
Mehta, Anshu; Gromova, Maria; Rusu, C.; Baert, Kris; Van Hoof, Chris; Witvrouw, Ann; Richard, Olivier (2004-01) -
Optimisation of PECVD poly-SiGe layers for MEMS post-processing on top of CMOS
Mehta, Anshu; Gromova, Maria; Czarnecki, Piotr; Baert, Kris; Witvrouw, Ann (2005) -
Poly SiGE microbolometer arrays
De Moor, Piet; Creten, Ybe; Du Bois, Bert; Garcia Cruz, M.; Goessens, Claus; Gromova, Maria; Leonov, Vladimir; Merken, Patrick; Perova, Natalia; Verbist, Agnes; Vermeiren, Jan; Van Hoof, Chris (2002) -
Poly-SiGe, a superb material for MEMS
Witvrouw, Ann; Gromova, Maria; Mehta, Anshu; Sedky, Sherif; De Moor, Piet; Baert, Kris; Van Hoof, Chris (2004) -
Stacked boron doped poly-crystalline silicon-germanium layers: an excellent MEMS structural layer
Claes, Gert; Van Barel, Greg; Van Hoof, Rita; Du Bois, Bert; Gromova, Maria; Verbist, Agnes; Van der Donck, Tom; Decoutere, Stefaan; Celis, Jean-Pierre; Witvrouw, Ann (2008) -
The novel use of low temperature hydrogenated microcrystalline silicon germanium (µcSiGe:H) for MEMS applications
Gromova, Maria; Baert, Kris; Van Hoof, Chris; Mehta, A.; Witvrouw, Ann (2004)