Browsing by author "Orzali, Tommaso"
Now showing items 1-10 of 10
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Epitaxy of III-V based channels on Si and transistor integration for 12-nm node CMOS
Caymax, Matty; Merckling, Clement; Wang, Gang; Orzali, Tommaso; Guo, Weiming; Vandervorst, Wilfried; Dekoster, Johan; Waldron, Niamh; Thean, Aaron (2012) -
In-Situ HCl etching of InP in shallow-trench-isolated structures
Orzali, Tommaso; Wang, G.; Waldron, Niamh; Merckling, Clement; Richard, Olivier; Bender, Hugo; Caymax, Matty (2011) -
In-Situ HCl etching of InP in shallow-trench-isolated structures
Orzali, Tommaso; Wang, G.; Waldron, Niamh; Richard, Olivier; Bender, Hugo; Wang, Wei-E; Caymax, Matty (2011) -
In-Situ HCl etching of InP in shallow-trench-isolated structures
Orzali, Tommaso; Wang, G.; Waldron, Niamh; Merckling, Clement; Richard, Olivier; Bender, Hugo; Wang, Wei-E; Caymax, Matty (2012) -
Integration of III-V on Si for high-mobility CMOS
Waldron, Niamh; Wang, G.; Nguyen, Ngoc Duy; Orzali, Tommaso; Merckling, Clement; Brammertz, Guy; Ong, Patrick; Winderickx, Gillis; Hellings, Geert; Eneman, Geert; Caymax, Matty; Meuris, Marc; Horiguchi, Naoto; Thean, Aaron (2012) -
Integration of InGaAs channel n-MOS devices on 200mm Si wafers using the aspect-ratio-trapping technique
Waldron, Niamh; Wang, Gang; Nguyen, Ngoc Duy; Orzali, Tommaso; Merckling, Clement; Brammertz, Guy; Ong, Patrick; Winderickx, Gillis; Hellings, Geert; Eneman, Geert; Caymax, Matty; Meuris, Marc; Horiguchi, Naoto; Thean, Aaron (2012) -
Optical metrology of thickness and indium content of epitaxial InxGa1-xAs layers on Si substrates
Jin, Youseung; Waldron, Niamh; Orzali, Tommaso; Caymax, Matty; Horiguchi, Naoto; Park, TaeHyun; Jiang, Zhiming; Han, SangHyun (2012) -
Selective area growth of InP on on-axis Si(001) substrates with low antiphase boundary formation
Loo, Roger; Wang, G.; Orzali, Tommaso; Waldron, Niamh; Merckling, Clement; Leys, Maarten; Richard, Olivier; Bender, Hugo; Eyben, Pierre; Vandervorst, Wilfried; Caymax, Matty (2011) -
Selective area growth of InP and defect elimination on Si (001) substrates
Loo, Roger; Wang, G.; Orzali, Tommaso; Waldron, Niamh; Merckling, Clement; Leys, Maarten; Richard, Olivier; Bender, Hugo; Eyben, Pierre; Vandervorst, Wilfried; Caymax, Matty (2011) -
Selective area growth of InP on on-axis Si(001) substrates with low antiphase boundary formation
Loo, Roger; Wang, Gang; Orzali, Tommaso; Waldron, Niamh; Merckling, Clement; Leys, Maarten; Richard, Olivier; Bender, Hugo; Eyben, Pierre; Vandervorst, Wilfried; Caymax, Matty (2012)