Browsing by author "Robertson, Stewart"
Now showing items 1-8 of 8
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A study of high NA EUV pattern stitching using rigorous stochastic lithography simulation
Robertson, Stewart; Schramm, Robert; Pret, Alessandro Vaglio; Wiaux, Vincent (2023) -
Characterization of a thermal freeze LLE double patterning process for predictive simulation
Robertson, Stewart; Wong, Patrick; Biafore, John; Vandenbroeck, Nadia; Wiaux, Vincent (2010) -
Comparative stochastic process variation bands for N7, N5, and N3 at EUV
Vaglio Pret, Alessandro; Graves, Trey; Blankenship, David; Bai, Kunlun; Robertson, Stewart; De Bisschop, Peter; Biafore, J. (2018) -
Interactions between imaging layers during LPLE double patterning lithography
Robertson, Stewart; Wong, Patrick; De Bisschop, Peter; Vandenbroeck, Nadia; Wiaux, Vincent (2012) -
Investigation of litho1-litho2 proximity differences for a LPLE double patterning process
Wong, Patrick; De Bisschop, Peter; Robertson, Stewart; Vandenbroeck, Nadia; Biafore, John; Wiaux, Vincent; Van de Kerkhove, Jeroen (2011) -
Litho 1-litho 2 proximity differences for s LELE and LPLE double patterning processes
Wong, Patrick; De Bisschop, Peter; Vandenbroeck, Nadia; Wiaux, Vincent; Van de Kerkhove, Jeroen; Robertson, Stewart; Biafore, John (2012) -
Modelling the lithography of ion implantation resists on topography
Winroth, Gustaf; Vaglio Pret, Alessandro; Ercken, Monique; Robertson, Stewart; Biafore, John J. (2014) -
Statistical simulation of resist at EUV and ArF
Biafore, John; Smith, Mark; Mack, Chris A.; Thackeray, James; Gronheid, Roel; Robertson, Stewart; Graves, Trey; Blankenship, David (2009)