Browsing by author "Chen, P.J."
Now showing items 1-5 of 5
-
Comparison of sub 1 nm TiN/HfO2 with Poly-Si/HfO2 gate stacks u sing scaled chemical oxide interfaces
Tsai, Wilman; Ragnarsson, Lars-Ake; Chen, P.J.; Onsia, Bart; Carter, Richard; Cartier, Eduard; Young, Edward; Green, Martin; Caymax, Matty; De Gendt, Stefan; Heyns, Marc (2003) -
Effect of Al-content and post deposition annealing on the electrical properties of ultra-thin HfAlxOy layers
Carter, Richard; Tsai, Wilman; Young, Edward; Maes, Jan; Chen, P.J.; Delabie, Annelies; Zhao, Chao; De Gendt, Stefan; Heyns, Marc (2003) -
Investigation of poly-Si/HfO2 gate stacks in a self-aligned 65 nm NMOS process flow
Kubicek, Stefan; Carter, Richard; Cartier, Eduard; Lujan, Guilherme; Kerber, Andreas; Kaushik, Vidya; Chen, P.J.; De Gendt, Stefan; Heyns, Marc (2002) -
Mobility in high-k dielectric based field effect transistors
Ragnarsson, Lars-Ake; Tsai, Wilman; Kerber, Andreas; Chen, P.J.; Cartier, E.; Pantisano, Luigi; De Gendt, Stefan; Heyns, Marc (2003) -
Thermal stability of high k layers
Zhao, Chao; Cosnier, V.; Chen, P.J.; Richard, Olivier; Roebben, G.; Maes, Jan; Van Elshocht, Sven; Bender, Hugo; Young, Edward; Van der Biest, O.; Caymax, Matty; Vandervorst, Wilfried; De Gendt, Stefan; Heyns, Marc (2003)