Browsing by author "Mueller, Matthias"

Aluminium oxide atomic layer deposition on semiconductor substrates

Delabie, Annelies; Sioncke, Sonja; Rip, Jens; Van Elshocht, Sven; Pourtois, Geoffrey; Mueller, Matthias; Beckhoff, Burkhard; Pierloot, Kristine (2011)

Fundamental aspects of germanium surface passivation by gas phase oxidation and liquid phase sulfidation

Fleischmann, Claudia; Schouteden, Koen; Houssa, Michel; Sioncke, Sonja; Mueller, Matthias; Van Haesendonck, Chris; Temst, Kristiaan; Vantomme, Andre (2014)

NEXAFS characterization of inorganic and organic materials for semiconductor application

Fleischmann, Claudia; Hoenicke, Philipp; Hermann, Peter; Mueller, Matthias; Beckhoff, Burkhard; Voroshazi, Eszter; Conard, Thierry; Vandervorst, Wilfried (2014)

Quantification of high-K nanolayers for semiconductor applications using synchrotron radiation and calibrated instrumentation

Mueller, Matthias; Hoenicke, Philipp; Detlefs, Blanka; Fleischmann, Claudia; Vandervorst, Wilfried; Beckhoff, Burkhard (2014)

Reaction mechanisms for atomic layer deposition of aluminum oxide on semiconductor substrates

Delabie, Annelies; Sioncke, Sonja; Rip, Jens; Van Elshocht, Sven; Pourtois, Geoffrey; Mueller, Matthias; Beckhoff, Burkhard; Pierloot, Kristine (2012)

Reference-free, depth dependent characterization of nanoscale materials by combined X-ray reflectivity and grazing incidence X-ray fluorescence analysis

Hoenicke, Philipp; Mueller, Matthias; Detlefs, Blanka; Fleischmann, Claudia; Beckhoff, Burkhard (2014)

Reference-free, depth-dependent characterization of nanoscaled materials using a combined grazing incidence X-ray fluorescence and X-ray reflectometry approach

Hoenicke, Philipp; Detlefs, Blanka; Fleischmann, Claudia; Vandervorst, Wilfried; Mueller, Matthias; Nolot, Emmanuel; Grampeix, Helen; Beckhoff, Burkhard (2015)

Reference-free, in-depth characterization of nanoscaled systems with advanced grazing incidence X-ray fluorescence analysis

Hoenicke, Philipp; Mueller, Matthias; Detlefs, Blanka; Fleischmann, Claudia; Beckhoff, Burkhard (2014)

Soft x-ray spectroscopy reveals chemical information beneath the surface of organic photovoltaic devices

Fleischmann, Claudia; Hoenicke, Philipp; Mueller, Matthias; Beckhoff, Burkhard; Voroshazi, Eszter; Tait, Jeffrey; Conard, Thierry; Vandervorst, Wilfried (2014)