Browsing by author "Loewenstein, Lee"
Now showing items 21-33 of 33
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Implementation of the IMEC-Clean in advanced CMOS manufacturing
Meuris, Marc; Arnauts, Sophia; Cornelissen, Ingrid; Kenis, Karine; Lux, Marcel; De Gendt, Stefan; Mertens, Paul; Teerlinck, Ivo; Vos, Rita; Loewenstein, Lee; Heyns, Marc; Wolke, K. (1999) -
Optimized rinsing for low metallic contamination
Loewenstein, Lee; Mertens, Paul (1998) -
Ozonated DI-water for clean chemical oxide growth
Cornelissen, Ingrid; Meuris, Marc; Wolke, K.; Wilkol, M.; Loewenstein, Lee; Doumen, Geert; Heyns, Marc (1998) -
Ozonated DI-water for clean chemical oxide growth
Cornelissen, Ingrid; Meuris, Marc; Wolke, K.; Wilkol, M.; Loewenstein, Lee; Doumen, Geert; Heyns, Marc (1999) -
Recent advances in wafer cleaning
Mertens, Paul; Vos, Rita; Bearda, Twan; Maes, Marjan; Lauerhaas, Jeff; Loewenstein, Lee; Fyen, Wim; Holsteyns, Frank; Kenis, Karine; Xu, Kaidong; Teerlinck, Ivo; Arnauts, Sophia; Schmidt, Michael; Heyns, Marc (2001) -
Surface cleaning issues in thin-oxide technology
Mertens, Paul; Bearda, Twan; Houssa, Michel; Loewenstein, Lee; Teerlinck, Ivo; De Gendt, Stefan; Vos, Rita; Kenis, Karine; Naili, Mohamed; Heyns, Marc (1999) -
The effect of ion implantation on the metal contamination of silicon surfaces in aqueous solution
Loewenstein, Lee; Mertens, Paul; Heyns, Marc (2001) -
The IMEC Clean: implementation in advanced CMOS manufacturing
Meuris, Marc; Arnauts, Sophia; Cornelissen, Ingrid; Kenis, Karine; Lux, Marcel; De Gendt, Stefan; Mertens, Paul; Teerlinck, Ivo; Vos, Rita; Loewenstein, Lee; Heyns, Marc (2000) -
The IMEC-Clean: A clean for advanced CMOS manufacturing
Meuris, Marc; Arnauts, Sophia; Cornelissen, Ingrid; Kenis, Karine; Lux, Marcel; De Gendt, Stefan; Mertens, Paul; Teerlinck, Ivo; Vos, Rita; Loewenstein, Lee; Heyns, Marc; Wolke, K. (2000) -
The rinsing problem: effect of solute-surface interactions on wafer purity
Loewenstein, Lee; Mertens, Paul (1998) -
The rinsing problem: effect of solute-surface interactions on wafer purity
Loewenstein, Lee; Mertens, Paul (1999) -
Vapor phase decomposition - droplet collection evalutation of a wafer surface preparation system
De Gendt, Stefan; Arnauts, Sophia; Witters, Thomas; Boehme, W.; Gonchond, J. P.; Huber, A.; Lerche, J.; Loewenstein, Lee; Rink, I.; Wortelboer, R.; Meuris, Marc; Heyns, Marc (2000) -
Wafer cleaning: a quantifiable process step
Mertens, Paul; Loewenstein, Lee; Vos, Rita; De Gendt, Stefan; Bearda, Twan; Heyns, Marc (1998)