Browsing by author "Bianchi, Davide"
Now showing items 1-4 of 4
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2D and 3D photoresist line roughness characterization
Vaglio Pret, Alessandro; Gronheid, Roel; Kunnen, Eddy; Pargon, Erwine; Luere, Olivier; Bianchi, Davide (2012) -
2D and 3D photoresist line roughness characterization
Vaglio Pret, Alessandro; Kunnen, Eddy; Gronheid, Roel; Pargon, Erwine; Luere, Olivier; Bianchi, Davide (2013) -
Impact of EUV lithography line edge roughness on 16 nm memory generation
Vaglio Pret, Alessandro; Poliakov, Pavel; Bianchi, Davide; Gronheid, Roel; Blomme, Pieter; Miranda Corbalan, Miguel; Van Houdt, Jan; Dehaene, Wim (2011) -
Linking EUV lithography line edge roughness and 16 nm NAND memory performance
Vaglio Pret, Alessandro; Poliakov, Pavel; Gronheid, Roel; Blomme, Pieter; Miranda Corbalan, Miguel; Dehaene, Wim; Verkest, Diederik; Van Houdt, Jan; Bianchi, Davide (2012)