Browsing by author "Baklanov, Mikhail"
Now showing items 1-4 of 4
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Cu passivation for integration of gap-filling ultralow-k dielectrics
Zhang, Liping; de Marneffe, Jean-Francois; Lesniewska, Alicja; Verdonck, Patrick; Heylen, Nancy; Murdoch, Gayle; Croes, Kristof; Boemmels, Juergen; Tokei, Zsolt; De Gendt, Stefan; Baklanov, Mikhail (2016) -
Integration of porous low-k dielectrics using post porosity pore protection
Zhang, Liping; de Marneffe, Jean-Francois; Verdonck, Patrick; Heylen, Nancy; Wen, Liang Gong; Wilson, Chris; Tokei, Zsolt; Boemmels, Juergen; De Gendt, Stefan; Baklanov, Mikhail (2016) -
Laser anneal of oxycarbosilane low-k film
Redzheb, Murad; Armini, Silvia; Vanstreels, Kris; Meersschaut, Johan; Baklanov, Mikhail; Wang, Yun; Chen, Shaoyin; Le, Van; Awdshiew, Michael; Van der Voort, Pascal (2016) -
Ultra low-k etching by neutral beams produced from CF4/Ar and SF6/Ar ICP plasmas
Zotovich, Alexey; El Otell, Ziad; Sutton, Yvonne; Braithwaite, N. St. J.; de Marneffe, Jean-Francois; Baklanov, Mikhail (2016)