Browsing by author "Horsfall, A.B."
Now showing items 1-4 of 4
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Application of a nano-mechanical sensor to monitor stress in copper damascene interconnects
Wilson, Chris; Croes, Kristof; Tokei, Zsolt; Vereecke, Bart; Beyer, Gerald; O'Neill, A.G.; Horsfall, A.B. (2009) -
In-situ growth of Cu-Mn alloy self-forming barriers in 100 nm Cu/Low-k damascene interconnects
Wilson, Chris; Volders, Henny; Tokei, Zsolt; Croes, Kristof; Pantouvaki, Marianna; Beyer, Gerald; Horsfall, A.B.; O'Neill, A.G. (2009) -
Study of the effect of dielectric porosity on the stress in advanced Cu/low-k interconnects using x-ray diffraction
Wilson, Chris; Zhao, Chao; Zhao, Larry; Metzger, T.H.; Tokei, Zsolt; Croes, Kristof; Pantouvaki, Marianna; Beyer, Gerald; Horsfall, A.B.; O Neill, A.G. (2009) -
Synchrotron measurement of the effect of line-width scaling on stress in advanced Cu/Low-k interconnects
Wilson, Chris; Croes, Kristof; Zhao, Chao; Metzger, T.H.; Zhao, Larry; Beyer, Gerald; Horsfall, A.B.; O'Neill, A.G.; Tokei, Zsolt (2009)