Browsing by author "van Berkum, J.G.M."
Now showing items 1-6 of 6
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Laser annealing for ultra-shallow junction formation in advanced CMOS
Surdeanu, Radu; Ponomarev, Youri; Cerutti, R.; Pawlak, Bartek; Nanver, L.K.; Hoflijk, Ilse; Stolk, Peter; Dachs, Charles; Verheijen, M.A.; Kaiser, M.; Hopstaken, M.J.P.; van Berkum, J.G.M.; Roozeboom, F.; Lindsay, Richard (2002) -
Local traps as nanoscale reaction-diffusion probes: B clustering in c-Si
Hantschel, Thomas; Pawlak, B.J.; Cowern, N.E.B.; Ahn, C.; Vandervorst, Wilfried; Gwilliam, R.; van Berkum, J.G.M. (2014) -
Properties of HfTaxOy high-k layers deposited by ALCVD
Zhao, Chao; Rittersma, Z.M.; van Berkum, J.G.M.; Snijders, J.H.M.; Hendriks, A.; Breimer, P.; Graat, P.; Maes, Jan; Witters, H.; Afanasiev, Valeri; Tois, E.; Tuominen, N.; Caymax, Matty; De Gendt, Stefan; Heyns, Marc (2005) -
Silicides for advanced CMOS devices
Lauwers, Anne; Kittl, Jorge; Van Dal, Mark; Chamirian, Oxana; Kmieciak, Malgorzata; Torregiani, Cristina; Liu, J.; Benedetti, Alessandro; Richard, Olivier; Bender, Hugo; van Berkum, J.G.M.; Kaiser, M.; Veloso, Anabela; Kottantharayil, Anil; de Potter de ten Broeck, Muriel; Maex, Karen (2005) -
Tantalum-based gate electrode metals for advanced CMOS devices
Hooker, Jacob; Lander, Rob; Cubaynes, Florence; Schram, Tom; Roozeboom, F.; van Zijl, J.; Maas, M.; van den Heuvel, F.C.; Naburgh, E.; van Berkum, J.G.M.; Tamminga, Y.; Dao, T.; Henson, Kirklen; Schaekers, Marc; Van Ammel, Annemie; Tokei, Zsolt; Demand, Marc; Dachs, C. (2005) -
The relation between phase formation and onset of thermal degradation in nano-scale CoSi2-polycrystalline silicon structures
Van Dal, Mark; Jawarani, D.; van Berkum, J.G.M.; Kaiser, M.; Kittl, Jorge; Vrancken, Christa; de Potter de ten Broeck, Muriel; Lauwers, Anne; Maex, Karen (2004-12)