Browsing by author "Kovalevich, Tatiana"
Now showing items 1-7 of 7
-
Critical pattern behavior at nanometer scale vicinity of black border
Kovalevich, Tatiana; Bekaert, Joost; Wiaux, Vincent; Liddle, Jack; Davydova, Natalia; Tien, Ming-Chun (2019) -
Evaluation of Lines and Spaces printing and general understanding of imaging with dark field low-n mask
Kovalevich, Tatiana; Van Look, Lieve; Franke, Joern-Holger; Philipsen, Vicky (2023) -
Imaging validation for LS of dark field low-n vs Ta-based absorber masks
Kovalevich, Tatiana; Van Look, Lieve; Moussa, Alain; Franke, Joern-Holger; Philipsen, Vicky (2023) -
Logic via printability enhancement using restricted via placement and exhaustive SRAF placement on a staggered grid
Woltgens, Pieter; Colina, Alberto; Rio, David; Delorme, Max; Kovalevich, Tatiana; Thiam, Arame; Van Roey, Frieda; Zografos, Odysseas (2022-05-26) -
Metal layer single EUV expose at pitch 28nm: how bright field and NTD resist advantages align
Franke, Joern-Holger; Frommhold, Andreas; Davydova, Natalia; Aubert, Remko; Nair, Vineet Vijayakrishnan; Kovalevich, Tatiana; Rio, David; Bekaert, Joost; Wang, Erik; Rispens, Gijsbert; Maslow, Mark; Hendrickx, Eric (2021) -
Spatial frequency breakdown of CD variation
Kovalevich, Tatiana; Witek, Barbara; Riggs, Daniel; Bekaert, Joost; Van Look, Lieve; Maslow, Mark John (2022) -
Stitching enablement for anamorphic imaging: a ~1μm exclusion band and its implications
Wiaux, Vincent; Bekaert, Joost; Kovalevich, Tatiana; Ryckaert, Julien; Hendrickx, Eric; Davydova, Natalia; Woltgens, Pieter; de Winter, Laurens; Maslow, Mark; Troost, Kars; Tien, Ming-Chun (2020)