EISBN
978-1-5106-4978-1
ISBN
978-1-5106-4977-4
ISSN
0277-786X
Conference
Conference on Optical and EUV Nanolithography XXXV Part of SPIE Advanced Conference
Journal
SPIE Proceedings Vol. 12051: Optical and EUV Nanolithography XXXV
Volume
12051
Research discipline
Electrical & electronic engineering
Title
Logic via printability enhancement using restricted via placement and exhaustive SRAF placement on a staggered grid
Publication type
Proceedings paper