Browsing by author "MKuppuswamy, Vijaya Kumar"
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Contact hole multiplication using grapho-epitaxy directed self-assembly: process choices, template optimization, and placement accuracy
Bekaert, Joost; Doise, Jan; MKuppuswamy, Vijaya Kumar; Gronheid, Roel; Chan, BT; Vandenberghe, Geert; Cao, Yi; Her, YoungJun (2014) -
Contact hole multiplication using grapho-epitaxy directed self-assembly: process choices, template optimization, and placement accuracy
Bekaert, Joost; Doise, Jan; MKuppuswamy, Vijaya Kumar; Chan, BT; Gronheid, Roel; Vandenberghe, Geert; Cao, Yi; Her, YoungJun (2014) -
Contact hole multiplication using grapho-epitaxy directed self-assembly: process choices, template optimization, and placement accuracy
Bekaert, Joost; Gronheid, Roel; MKuppuswamy, Vijaya Kumar; Doise, Jan; Chan, BT; Vandenberghe, Geert; Sayan, Safak; Cao, Yi; Her, YoungJun (2014) -
Effect of processing parameters on self-assembly of cylindrical phase PS-b-PMMA BCPs on 300 mm Si wafers
Loucif Seiad, Mohamed; Singh, Arjun; MKuppuswamy, Vijaya Kumar; Ferhat, Marhoun; Gronheid, Roel (2014) -
Line Edge Roughness on Directed Self Assembly: Impact of process conditions
MKuppuswamy, Vijaya Kumar; Williamson, Lance; Pathangi Sriraman, Hari; Seidel, Robert; Gronheid, Roel; Nealey, Paul; Lin, Guanyang; Cao, Yi (2015) -
PMMA removal in diblock copolymer P(S-b-MMA) self-assembly process
Loucif Seiad, Mohamed; Gronheid, Roel; Singh, Arjun; MKuppuswamy, Vijaya Kumar; Cao, Yi; Ferhat, Marhoun (2014) -
Process optimization of templated DSA flows
Gronheid, Roel; Bekaert, Joost; MKuppuswamy, Vijaya Kumar; Vandenbroeck, Nadia; Doise, Jan; Cao, Yi; Lin, Guanyang; Sayan, Safak; Parnell, Doni; Somervell, Mark (2014) -
Readying directed self-assembly for patterning in semiconductor manufacturing
Gronheid, Roel; Chan, BT; Pathangi Sriraman, Hari; Van Den Heuvel, Dieter; MKuppuswamy, Vijaya Kumar; Doise, Jan; Bekaert, Joost; Rincon Delgadillo, Paulina; Nealey, Paul; Cao, Yi; Her, YoungJun; Sayan, Safak; Parnell, Doni; Romo Negreira, Ainhoa; Somervell, Mark (2014)