Browsing by author "Vanelderen, Pieter"

A Laboratory Light Source for Ultrafast Kinetics of EUV Exposure Processes and Ultra-Small Pitch Lithography

Cousin, Seth L.; Bargsten, Clayton; Rinard, Eric; Ward, Rod; Hosler, Erik; Petersen, Brennan; Kapteyn, Henity; Vanelderen, Pieter; Petersen, John; van der Heide, Paul (2020)

High volume manufacturing compatible dry development rinse process (DDRP): patterning and defectivity performance for EUVL

Sayan, Safak; Vanelderen, Pieter; Hetel, Iulian; Chan, BT; Raghavan, Praveen; Blanco, Victor; Foubert, Philippe; D'Urzo, Lucia; De Simone, Danilo; Vandenberghe, Geert (2017)

Impact of sequential infiltration synthesis (SIS) on roughness and stochastic nano-failures for EUVL patterning

Vanelderen, Pieter; Blanco, Victor; Mao, Ming; Tomczak, Yoann; De Roest, David; Kissoon, Nicola; Rincon Delgadillo, Paulina; Rispens, Gijsbert; Schiffelers, Guido; Pathak, Abhinav; Lazzarino, Frederic; De Simone, Danilo; De Poortere, Etienne; Mc Manus, Moyra; Piumi, Daniele; Hendrickx, Eric; Vandenberghe, Geert (2019)

Introduction to imec's AttoLab for ultrafast kinetics of EUV exposure processes and ultra-small pitch lithography

Holzmeier, Fabian; Dorney, Kevin; Witting Larsen, Esben; Nuytten, Thomas; Singh, Dhirendra; van Setten, Michiel; Vanelderen, Pieter; Bargsten, Clayton; Cousin, Seth; Raymondson, Daisy; Rinard, Eric; Ward, Rod; Kapteyn, Henry; Bottcher, Stefan; Dyachenko, Oleksiy; Kremzow, Raimund; Wietstruk, Marko; Pourtois, Geoffrey; van der Heide, Paul; Petersen, John (2021-02-22)

LCDU optimization of STT-MRAM 50nm pitch MTJ pillars for process window improvement

Pak, Murat; Crotti, Davide; Yasin, Farrukh; Ercken, Monique; Halder, Sandip; De Simone, Danilo; Vanelderen, Pieter; Souriau, Laurent; Hody, Hubert; Kar, Gouri Sankar (2019)

Photo material readiness at the eve of EUVL HVM

De Simone, Danilo; Vanelderen, Pieter; Vandenberghe, Geert (2017)

Staggered pillar patterning using 0.33NA EUV lithography

De Simone, Danilo; Blanc, Romuald; Van de Kerkhove, Jeroen; Tamaddon, Amir-Hossein; Fallica, Roberto; Van Look, Lieve; Rassoul, Nouredine; Lazzarino, Frederic; Vandenbroeck, Nadia; Vanelderen, Pieter; Lorusso, Gian; Van Roey, Frieda; Charley, Anne-Laure; Vandenberghe, Geert; Ronse, Kurt; Lee, Kilyoung; Lee, Junghyung; Park, Sarohan; Lim, Chang-Moon; Park, Chan-Ha (2019)