Browsing by author "Green, M.L."
Now showing items 1-5 of 5
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Application of combinatorial methodologies for work function engineering of metal gate/high-k advanced gate stacks
Green, M.L.; Chang, Shou-Zen; De Gendt, Stefan; Schram, Tom; Hattrick-Simpers, J. (2007-09) -
Combinatorial methodology for the exploration of metal gate electrodes on HfO2 for the advanced gate stack
Chang, Kao-Shuo; Green, M.L.; Suehle, J.; Hattrick-Simpers, J.; Takeuchi, I.; Ohmori, K.; Chikyow, T.; De Gendt, Stefan; Majhi, P. (2008) -
Combinatorial methodology for the exploration of metal gate electrodes on HfO2 for the advanced gate stack
Chang, K.S.; Green, M.L.; Suehle, J.; Hattrick-Simpers, J.; Takeuchi, I.; Ohmori, K.; Chikyow, T.; De Gendt, Stefan; Majhi, P. (2008) -
Gate oxide atomic layer deposition studied by in situ infrared spectroscopy
Frank, M.M.; Dörmann, S.; Chabal, Y.J.; Sayan, S.; Garfunkel, E.; Wilk, G.D.; Green, M.L.; Delabie, Annelies; Brijs, Bert (2003) -
Physical and chemical characterization of combinatorial metal gate electrode Ta–C–N library film
Chang, K.S.; Green, M.L.; Levin, I.; Hattrick-Simpers, J.R.; Jaye, C.; Fischer, D.A.; Takeuchi, I.; De Gendt, Stefan (2010)